主要性能优势：

1.采用先进的逆变技术与进口IGBT模块搭配设计 。

2.占空比、电压大范围连续平稳可调，控制精度高 。

3.微秒级灭弧，具有抑制弧光放电及过载保护功能 。

4.理想的电压陡降特性，有效抑制离子源源头表面打火 。

5.体积小、性能稳定可靠，保障工艺连续性 。

6.极佳的负载匹配能力。

Main Performance Advantages:

1. Utilizes advanced inverter technology paired with imported IGBT modules in its design.

2. Duty cycle and voltage can be adjusted continuously over a wide range, ensuring high control precision.

3. Features microsecond-level arc extinguishing, providing arc suppression and overload protection capabilities.

4. Offers ideal voltage drop characteristics, effectively suppressing arcing on the surface of the ion source.

5. Compact in size, stable, and reliable in performance, ensuring process continuity.

6. Exhibits excellent load matching capabilities.